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Description
Key Features
- Clean, particle-free design that meets stringent semiconductor equipment standards. Modular design that supports frog leg and SCARA linkages, with and without Z travel, and is easily extendable to more rotary axes.
- High throughput and productivity.
- High repeatability
- Easy-to-integrate communication interface
More Information
Part Number | 301-00970-01 |
---|---|
Condition | New |
MFG | R Systems |
MFG# | 301-00970-01 |